AIGX Active Ion Gauge
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AIGX Active Ion Gauge

 

 

Overview

A compact Active ion gauge with dual yttria coated iridium filaments, a wide measuring range from 6.6 x 10-2 to 6.6 x 10-10 mbar (5 x 10-2 to 5 x 10-10 Torr) and a 1 Volt/decade linear output. The new AIGX gauge from Edwards incorporates all the benefits of the industry standard Active gauging concept, with integral electronics and replaceable tube. The gauge has a degas facility and includes features to protect and extend the life of the filaments.
The AIGX benefits from extremely low emissions of charged particles, which makes it an excellent choice for processes where background noise is undesirable.

Technology

The AIGX is an ion gauge head and gauge controller in a single compact unit. The gauge operates as a hot filament ionisation gauge, in which the pressure is measured indirectly as a function of the current. The AIGX requires a 14.5 - 30 V d.c. power supply; it has a 0 to 10 V d.c.analogue output which is related to pressure. The AIGX is compatible with the Edwards Active Gauge Controller (AGC). Alternatively, you can use an independent power supply and you can read the output signal with a voltmeter or analogue to digital converter. The AIGX is supplied with two filaments. A switch on top of the gauge selects between filament 1 and 2. There are two levels of emission currents: 0.1 and 1 mA. The gauge will automatically select 1 mA emission current at low pressure, and 0.1 mA at high pressure. A protection circuit is built into the gauge to prevent operating the gauge at pressures higher than 5 x 10-2 torr.

The AIGX can be degassed using the degas feature. During degas, the grid voltage is 500 V and the emission current is 10 mA. The degas is inhibited at high pressure. The maximum duration of degas is three minutes, after which the gauge returns automatically to its normal mode.
The AIGX has a set-point facility. The set-point signal is an open collector transistor output, which is on when the pressure measured by the gauge is below a preset pressure. The pressure at which the set-point operates can be adjusted using the set-trip switch on the top of the gauge (Figure 1,item 3).
The AIGX is fitted with a status LED (Figure 1, item 4) . This LED indicates the operating status of the gauge.

Features and Benefits

  • Full 8-decade measurement capability, to 6.6 x 10-10 mbar (5 x 10-10 Torr).
  • Two versions available, each with three vacuum coupling variants: 
    • ‘D’ versions have a 9-pin ‘D’ connector and standard interface; 
    • ‘S’ versions have enhanced functionality and are fully compatible with the range of Edwards controllers.
  • Up to a thirty-fold reduction in charged particle process contamination compared to leading competitors.
  • Automatic filament protection against switching on at atmosphere and running or degassing at high pressure.
  • Gauge sensitivity remains constant over the whole measuring range, thus maintaining output accuracy at higher pressures.
  • Continuous pressure measurement output during degas.
  • Innovative design eliminates the effects of X-ray limits.
  • Bi-color LED gives local indication of gauge status.
  • Wide input voltage range.
  • Electronics very easily removable for bakeout at up to 200 °C.
  • ‘S’ versions provided with seamless automatic emission current switching, for prolonged filament life.
  • ‘S’ versions provided with diagnostic outputs indicating ‘emission off’, ‘broken filament’ and ‘overpressure trip’ to help with troubleshooting.
  • ‘S’ versions provided with a push-button adjustable set point.

 

Documents Download

Active Ion Gauge Datasheet

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