Turbo-V 2K-G Turbo Pump

 

Turbo-V 2K-G

The Turbo-V 2K-G is more than a pump. It is a dedicated pumping system, designed specifically for the plasma process industry. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of argon gas and very high temperatures. Additionally, it features built-in control electronics, an integrated vent and purge valve, and maintenance-free bearings. All of these assets make the Agilent Turbo-V 2K-G the optimum pumping solution for the coating industry.

Features

  • The first application-specific pumping solution designed for thin film deposition equipment
  • The highest performing, most compact unit available
  • The first fully integrated approach for maximum system productivity and uptime
  • Integrated package includes Turbo Molecular Pump, Drive Electronics, Power Supply, MoniTorr, Purge Gas and Communication
  • Versatile electronics interface with easy to use control Software Analog I/O signals and RS232 / RS485 interface as standard
  • Agilent Profibus interface (optional)
  • Utilizes Agilent's T-plus Software
  • Typical Turbo Pump Applications

 

 

 

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