Miniature Pump

Miniature Pump

                                   

Agilent Technologies offers a wide variety of small size ion pumps designed especially for electron device and detector applications. The Miniature VacIon pump is a diode configuration and provides approximately 0.4 l/s of nitrogen pumping speed.

The 2 l/s model is a modified diode configuration to enhance starting at low pressure. The 10 l/s pump is a diode configuration with high efficiency for residual gases such as hydrogen.

 

Features

  • Pump has a diode configuration and provides approximately 0.4 l/s of nitrogen pumping speed
  • Pumps can be customized with different high-voltage feedthroughs, body geometries, and pumping cell arrangements.
  • The 2 l/s Miniature VacIon pump has been modified to enhance starting at low pressure.
  • The 10 l/s Miniature VacIon pump is highly efficient for dealing with residual gases such as hydrogen.

 

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