EPX HIGH VACUUM DRY PUMPS
The EPX Series offers on-tool pumping in a lighter and smaller package, requiring only 1.4 kilowatts of power. Using a unique, patented, single-shaft regenerative/ Holweck® stage mechanism, EPX pumps are capable of pumping from atmosphere to ultimate pressures of <7 x 10e-7 Torr.
Offering enhanced performance in a modular package, EPX pumps can be integrated onto a process tool or mounted remotely. Integrated electronics also provide simple communication connections to the process tool. The EPX Series supports clean and light duty semiconductor processing applications such as ash/strip and implant end station applications.
Unique patented mechanism
Field proven mechanism delivers outstanding performance with low cost of ownership.
Modular design offers minimal footprint and easy installation with networking and local control available using the End User Controller (EUC).
The MicroTIM tool interface allows plug-and-pump functionality with all major semiconductor tools.
