iXH Dry Pumps for Harsh Processes

iXH Dry Pumps for Harsh Processes

 

The iXH dry pump range is an evolution of our market leading iH products and sets new standards for harsh process capability, reliability and lower cost of ownership.

With a modular design, iXH pumps meet today's process requirements and have road-mapped responses to emerging application challenges in high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN and EPI.

 

Features & Benefits

• More process capability
    - Greatly increased powder handling capability and innovative Gas Buster™ technology
    - Wide temperature range allows optimisation of pump to minimise by-product accumulation by condensation and plating
    - Innovative pump seal technology to lengthen process life and reduce leakage risks
• Reduced cost of ownership
    - 10% less energy consumption
    - SEMI® E54 compatible and Green Mode capable
    - Longer overhaul intervals and less unscheduled down time
• Greatly increased hydrogen pumping speed for advanced EPI and solar processes
• High capacity dry pumps and boosters give an expanded process window to enhance yields
• Smaller footprint and lower height for ease of fitting in any fab
• Complies with key international standards including UL, CE and S2

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