iH Dry Pumps

iH series dry pump - first choice for vacuum solutions

 

Edwards is a leading supplier of integrated process-enabling technologies, materials and services for semiconductor and Flat Panel Display (FPD) processes.
Products include vacuum pumps, exhaust gas management, liquid abatement, and monitoring and control equipment. An extensive range of services includes equipment repair, and on-site materials and equipment support.
Edwards has over 200,000 pumps installed, supporting 200 mm and 300 mm fabs worldwide and operates in every major semiconductor manufacturing region. Edwards advanced semiconductor vacuum pumps have been fieldproven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimising footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present. iH dry pumps are available in a range of peak speeds, from 80 to 1800 m3/h.
iH1800 dry pumps are specifically designed for high-throughput applications.


Semiconductor Industry Standards Compliance


The iH series dry pumps comply with internationally recognised semiconductor industry standards: SEMI® S2 (Semiconductor Equipment and Materials International), ETL (Energy Technology Laboratories), which conforms to UL Standard 3101-1 and CE Mark (European Community Mark).

Benefits

Pumping expertise and leadership
Edwards is the global market leader for advanced vacuum pumps, supplying over 40% of the pumps currently installed in 300 mm fabs. With more than 200,000 Edwards dry pumps supplying vacuum on 200 mm and 300 mm processes, reliability has been proven.
Proven design
The iH Series has been designed with cantilevered shafts and specially profiled rotors for better handling of particles. Reserve motor power also maximises reliability on harsh-duty CVD applications. Corrosion resistant materials allow pumping of corrosive gases while higher operating temperatures provide ample margin to prevent gas condensation.
Low cost of ownership
The iH Series minimises ownership costs through optimised utilities consumption and with no preventative maintenance required. High operating temperatures minimise the amount of N2 dilution required and the absence of greased bearings eliminates the need for intervention between overhauls.
Optimised footprint
The one-piece shaft eliminates the need for a motor coupling and a fifth pumping stage removes the need for a silencer and eliminates particle accumulation, both reducing the overall footprint.

Applications

Technical Data

 

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