Applications
- Inspectable flanges for process control, plasma and oven
- Insertion of (UV) laser light into reaction tube (quartz flange)
- UV protection with Duran® flanges
- Quartz for lowest UV absorption
- Vacuum up to 10E-9 mbar
- Temp. range of quartz up to 1000 degC / Duran® up to 450 degC
- Pressure up to 2 bar
- Minimum temperature -30 degC
- For ultra pure processes as ion implanters etc. (quartz)
|
KF tees (glass) |
|
NW |
A |
B |
|
10 |
40 |
80 |
|
15 |
40 |
80 |
|
25 |
50 |
100 |
|
40 |
65 |
130 |
|
50 |
70 |
70 |
|
63 |
75 |
75 |
|
Type NW |
Duran® |
Quartz |
|
10 |
33.010007.161.710 |
33.010008.161.810 |
|
16 |
33.016007.161.716 |
33.016008.161.816 |
|
25 |
33.025007.161.725 |
33.025008.161.825 |
|
40 |
33.040007.161.740 |
33.040008.161.840 |
|
50 |
33.050007.161.750 |
33.050008.161.850 |
|
63 |
33.063007.161.763 |
33.063008.161.863 |