Inland TW & HVTW Pump Fluids
INLAND TW® is a semi-synthetic hydrocarbon vacuum oil specifically recommended for applications
in rotary vane pumps where exposure to reactive or corrosive gases is prevalent.
This product is a distilled hydrocarbon containing no additives. Both unsaturates and aromatics have been
removed, resulting in a superior, longer-lasting pump fluid.
INLAND HVTW® is also available for use in piston pumps, with the appropriate viscosity necessary.
Typical applications include nitride deposition, LPCVD, plasma etching, and ion implantation. When
compared to Invoil 20, Inland HVTW lasts 1.5 to 4 times longer.
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