Access Doors

Access Doors are offered in two configurations, one with a mounting flange to bolt to your flanged port and one without a mounting flange for direct mounting to an existing flange.

The flange to which the door is hinged mates with an identical flange on the chamber or load lock. A captured Viton® O-ring in the face of the door provides the door seal when it is closed and locked.

 

 

Access Door with Mounting flange (with viewport)

P/N Size Flange OD A B C T
AVD-275 CF35 2.75" 2.24" 2.32" 2.05" 1.00"
AVD-450 CF63 4.50" 2.92" 3.25" 2.07" 1.36"
AVD-600 CF100 6.00" 4.95" 4.12" 2.36" 1.56"
AVD-800 CF150 8.00" 5.93" 4.81" 2.54" 1.74"
AVD-1000 CF200 10.00" 7.00" 5.73" 2.74" 1.94"

 

 

Access Door with Mounting flange (without viewport)

P/N Size Flange OD A B C T
APD-275 CF35 2.75" 2.24" 2.32" 2.05" 1.00"
APD-450 CF63 4.50" 2.92" 3.25" 2.07" 1.36"
APD-600 CF100 6.00" 4.95" 4.12" 2.36" 1.56"
APD-800 CF150 8.00" 5.93" 4.81" 2.54" 1.74"
APD-1000 CF200 10.00" 7.00" 5.73" 2.74" 1.94"