SRS Closed Ion Source RGA CIS100/200/300

Features:

· 100, 200 and 300 amu systems
· 1 ppm detection
· 10 mTorr max. operating pressure
· 1 × 10−12 Torr detection limit
· RGA Windows software
· Field-replaceable electron multiplier and filament
· RGA and CIS mode

With better than 1 ppm detection limit, direct sampling at mTorr pressure, and a user-friendly Windows software package, the CIS systems will satisfy your most demanding applications. On-line process monitoring and control, verification of process gas purity at the point of use, high-vacuum residual gas analysis, and process equipment leak checking are some of the areas where these systems will prove indispensable.

Compact Design

The probe consists of a quadrupole mass spectrometer with a CIS ionizer mounted inside a 2.75" Conflat® Tee. The control unit mounts directly on the probe’s feedthrough flange and contains all the necessary electronics for operating the instrument. The side port of the CIS nipple provides a connection for the differential pumping system that keeps the quadrupole, filament and detector at high vacuum. The system can be connected directly to a process chamber through its standard CIS mounting flange (2.75” CF). All parts in the unit are self-aligning making servicing easy. You can clean and reassemble the probe, and replace the filament and electron multiplier in the field, without ever calling the factory.

Gold Plated Ionizer

The entire ionizer is made of gold-plated stainless steel. This reduces outgassing and background signals in the ionization region, improves long-term stability, and permits operation while exposed to reactive and corrosive gases. A tungsten filament is used, which resists corrosive and reactive gases like WF6 and silane, and leads to extended lifetime. The closed (gas tight) design of the ionizer prevents commonly interfering species from backstreaming into the ionization volume. This produces peaks free of spectral overlap.

 

 

 

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