iXL Dry Pumps for FPD Applications

iXL Dry Pumps for flat panel display, solar loadlock and clean duty applications.

 

The iXL family of dry pumps cover the entire range of pumpdown requirements encountered in the flat panel display (FPD) and solar manufacturing market sectors - from the smaller loadlocks at Generation 4, right up to the largest at Generation 8 or 10.
These leading-performance pumps are designed to maximise substrate throughput, while minimising power, footprint and weight. In addition, no maintenance is required between overhauls.

 

 

 

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